Wafer Fabrication: Automatic Material Handling System
Jie Zhang
Sep 2018 · Walter de Gruyter GmbH & Co KG
Kitabu pepe
284
Kurasa
reportUkadiriaji na maoni hayajahakikishwa Pata Maelezo Zaidi
Kuhusu kitabu pepe hiki
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
Kuhusu mwandishi
Jie Zhang, Shanghai Jiaotong University, Shanghai, China
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