Wafer Fabrication: Automatic Material Handling System
Jie Zhang
Sep 2018 · Walter de Gruyter GmbH & Co KG
Ebook
284
Pages
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About this ebook
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
About the author
Jie Zhang, Shanghai Jiaotong University, Shanghai, China
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