Microsystem Dynamics: Principles and Applications

Microsystems or microelectromechanical systems (MEMS) are miniaturized devices with components measured in micrometers that perform micro- to nanometer scale electronic machine functions such as actuations. Since research and industrial production in recent decades has generated considerable knowledge of microsystem dynamics, there is an urgent need for a single guide which combines microsystem theory with practical applications to provide a general framework.

Microsystem Dynamics fills this need, with the first single-volume overview of its kind. It presents the fundamental principles of microsystem dynamics in a unified theoretical framework, engineered to govern both analysis and design. Its discussion of applications includes cutting-edge methods for applying non-stationary, stochastic, non-linear dynamics and multi-physics of microsystems. Fully engaged with the latest research, this promises to be the essential single-volume introduction to its subject.

Microsystem Dynamics readers will find:

• Discussion of advanced tools such as nonlinear signal processing, computational intelligence, and nonlinear chaos dynamics
• An authorial team with extensive experience in both academic and industrial research
• Analysis of stability and durability factors in dynamical microsystems

Microsystem Dynamics is a useful reference for researchers and practitioners working in microscale engineering, as well as graduate students in mechanical, automotive, and electrical engineering.