Micromachined Ultrasound-Based Proximity Sensors
Mark R. Hornung · Oliver Brand
Dis 2012 · Microsystems Ibhuku elingu-4 · Springer Science & Business Media
I-Ebook
121
Amakhasi
reportIzilinganiso nezibuyekezo aziqinisekisiwe Funda Kabanzi
Mayelana nale ebook
Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems.
Micromachined Ultrasound-Based Proximity Sensors describes a cost-effective approach to the realization of a micro electro mechanical system (MEMS). The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques. Additionally, this approach allows the cointegration of the driving and read-out circuitry. To ensure the industrial applicability of the fabricated transducer elements intensive long-term stability and reliability tests were performed under various environmental conditions such as high temperature and humidity.
Great effort was undertaken to investigate the packaging and housing of the ultrasound system, which mainly determine the success or failure of an industrial microsystem. A low-stress mounting of the transducer element minimizes thermomechanical stress influences. The developed housing not only protects the silicon chip but also improves the acoustic performance of the transducer elements.
The developed ultrasound proximity sensor system can determine object distances up to 10 cm with an accuracy of better than 0.8 mm.
Micromachined Ultrasound-Based Proximity Sensors will be of interest to MEMS researchers as well as those involved in solid-state sensor development.
Micromachined Ultrasound-Based Proximity Sensors describes a cost-effective approach to the realization of a micro electro mechanical system (MEMS). The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques. Additionally, this approach allows the cointegration of the driving and read-out circuitry. To ensure the industrial applicability of the fabricated transducer elements intensive long-term stability and reliability tests were performed under various environmental conditions such as high temperature and humidity.
Great effort was undertaken to investigate the packaging and housing of the ultrasound system, which mainly determine the success or failure of an industrial microsystem. A low-stress mounting of the transducer element minimizes thermomechanical stress influences. The developed housing not only protects the silicon chip but also improves the acoustic performance of the transducer elements.
The developed ultrasound proximity sensor system can determine object distances up to 10 cm with an accuracy of better than 0.8 mm.
Micromachined Ultrasound-Based Proximity Sensors will be of interest to MEMS researchers as well as those involved in solid-state sensor development.
Nikeza le ebook isilinganiso
Sitshele ukuthi ucabangani.
Ulwazi lokufunda
Amasmathifoni namathebulethi
Faka uhlelo lokusebenza lwe-Google Play Amabhuku lwe-Android ne-iPad/iPhone. Livunyelaniswa ngokuzenzakalela ne-akhawunti yakho liphinde likuvumele ukuthi ufunde uxhunywe ku-inthanethi noma ungaxhunyiwe noma ngabe ukuphi.
Amakhompyutha aphathekayo namakhompyutha
Ungalalela ama-audiobook athengwe ku-Google Play usebenzisa isiphequluli sewebhu sekhompuyutha yakho.
Ama-eReaders namanye amadivayisi
Ukuze ufunde kumadivayisi e-e-ink afana ne-Kobo eReaders, uzodinga ukudawuniloda ifayela futhi ulidlulisele kudivayisi yakho. Landela imiyalelo Yesikhungo Sosizo eningiliziwe ukuze udlulise amafayela kuma-eReader asekelwayo.
