Methods and Materials in Microelectronic Technology

ยท Springer Science & Business Media
แƒ”แƒšแƒฌแƒ˜แƒ’แƒœแƒ˜
367
แƒ’แƒ•แƒ”แƒ แƒ“แƒ˜
แƒ แƒ”แƒ˜แƒขแƒ˜แƒœแƒ’แƒ”แƒ‘แƒ˜ แƒ“แƒ แƒ›แƒ˜แƒ›แƒแƒฎแƒ˜แƒšแƒ•แƒ”แƒ‘แƒ˜ แƒ“แƒแƒฃแƒ“แƒแƒกแƒขแƒฃแƒ แƒ”แƒ‘แƒ”แƒšแƒ˜แƒ ย แƒจแƒ”แƒ˜แƒขแƒงแƒ•แƒ”แƒ— แƒ›แƒ”แƒขแƒ˜

แƒแƒ› แƒ”แƒšแƒฌแƒ˜แƒ’แƒœแƒ˜แƒก แƒจแƒ”แƒกแƒแƒฎแƒ”แƒ‘

The papers collected in this volume were presented at the International Symposium on Methods and Materials in Microelectronic Technology. This symposium was sponsored by IBM Germany, and it was held September 29 - October 1, 1982, in Bad Neuenahr, West Germany. The progress of semiconductor and microelectronic technology has become so rapid and the field so sophisticated that it is imperative to exchange the latest insight gained as frequently as it can be accomplished. In addition, it is peculiar for this field that the bulk of the investigations are carried out at industrial research and development laboratories, which makes some of the results less readily accessible. Because of these circumstances, the academic community, which among other things, is supposed to communicate the prog ress in this field to students of different disciplines, finds it rather difficult to stay properly informed. It was the intent of this IBM sponsored symposium to bring together key scientists from academic institutions, primarily from Europe, with principal investigators of the industrial scene. Accordingly, this symposium exposed technologists to scientists and vice versa. Scientific advances often lead directly to technological innovations. In turn, new technologies are often arrived at empirically and, because of that, are initially poorly understood. Scientific inquiry then attempts to probe these processes and phenomena in order to achieve a better understanding. Thus science and technology are intricately interconnected, and it is important that technical exchange between technolo gists and scientists is facilitated, since the problems are typically interdiscipli nary in nature.

แƒจแƒ”แƒแƒคแƒแƒกแƒ”แƒ— แƒ”แƒก แƒ”แƒšแƒฌแƒ˜แƒ’แƒœแƒ˜

แƒ’แƒ•แƒ˜แƒ—แƒฎแƒแƒ แƒ˜แƒ— แƒ—แƒฅแƒ•แƒ”แƒœแƒ˜ แƒแƒ–แƒ แƒ˜.

แƒ˜แƒœแƒคแƒแƒ แƒ›แƒแƒชแƒ˜แƒ แƒฌแƒแƒ™แƒ˜แƒ—แƒฎแƒ•แƒแƒกแƒ—แƒแƒœ แƒ“แƒแƒ™แƒแƒ•แƒจแƒ˜แƒ แƒ”แƒ‘แƒ˜แƒ—

แƒกแƒ›แƒแƒ แƒขแƒคแƒแƒœแƒ”แƒ‘แƒ˜ แƒ“แƒ แƒขแƒแƒ‘แƒšแƒ”แƒขแƒ”แƒ‘แƒ˜
แƒ“แƒแƒแƒ˜แƒœแƒกแƒขแƒแƒšแƒ˜แƒ แƒ”แƒ— Google Play Books แƒแƒžแƒ˜ Android แƒ“แƒ iPad/iPhone แƒ›แƒแƒฌแƒงแƒแƒ‘แƒ˜แƒšแƒแƒ‘แƒ”แƒ‘แƒ˜แƒกแƒ—แƒ•แƒ˜แƒก. แƒ˜แƒก แƒแƒ•แƒขแƒแƒ›แƒแƒขแƒฃแƒ แƒแƒ“ แƒ’แƒแƒœแƒแƒฎแƒแƒ แƒชแƒ˜แƒ”แƒšแƒ”แƒ‘แƒก แƒกแƒ˜แƒœแƒฅแƒ แƒแƒœแƒ˜แƒ–แƒแƒชแƒ˜แƒแƒก แƒ—แƒฅแƒ•แƒ”แƒœแƒก แƒแƒœแƒ’แƒแƒ แƒ˜แƒจแƒ—แƒแƒœ แƒ“แƒ แƒกแƒแƒจแƒฃแƒแƒšแƒ”แƒ‘แƒแƒก แƒ›แƒแƒ’แƒชแƒ”แƒ›แƒ—, แƒฌแƒแƒ˜แƒ™แƒ˜แƒ—แƒฎแƒแƒ— แƒกแƒแƒกแƒฃแƒ แƒ•แƒ”แƒšแƒ˜ แƒ™แƒแƒœแƒขแƒ”แƒœแƒขแƒ˜ แƒœแƒ”แƒ‘แƒ˜แƒกแƒ›แƒ˜แƒ”แƒ  แƒแƒ“แƒ’แƒ˜แƒšแƒแƒก, แƒ แƒแƒ’แƒแƒ แƒช แƒแƒœแƒšแƒแƒ˜แƒœ, แƒ˜แƒกแƒ” แƒฎแƒแƒ–แƒ’แƒแƒ แƒ”แƒจแƒ” แƒ แƒ”แƒŸแƒ˜แƒ›แƒจแƒ˜.
แƒšแƒ”แƒžแƒขแƒแƒžแƒ”แƒ‘แƒ˜ แƒ“แƒ แƒ™แƒแƒ›แƒžแƒ˜แƒฃแƒขแƒ”แƒ แƒ”แƒ‘แƒ˜
Google Play-แƒจแƒ˜ แƒจแƒ”แƒซแƒ”แƒœแƒ˜แƒšแƒ˜ แƒแƒฃแƒ“แƒ˜แƒแƒฌแƒ˜แƒ’แƒœแƒ”แƒ‘แƒ˜แƒก แƒ›แƒแƒกแƒ›แƒ”แƒœแƒ แƒ—แƒฅแƒ•แƒ”แƒœแƒ˜ แƒ™แƒแƒ›แƒžแƒ˜แƒฃแƒขแƒ”แƒ แƒ˜แƒก แƒ•แƒ”แƒ‘-แƒ‘แƒ แƒแƒฃแƒ–แƒ”แƒ แƒ˜แƒก แƒ’แƒแƒ›แƒแƒงแƒ”แƒœแƒ”แƒ‘แƒ˜แƒ— แƒจแƒ”แƒ’แƒ˜แƒซแƒšแƒ˜แƒแƒ—.
แƒ”แƒšแƒฌแƒแƒ›แƒ™แƒ˜แƒ—แƒฎแƒ•แƒ”แƒšแƒ”แƒ‘แƒ˜ แƒ“แƒ แƒกแƒฎแƒ•แƒ แƒ›แƒแƒฌแƒงแƒแƒ‘แƒ˜แƒšแƒแƒ‘แƒ”แƒ‘แƒ˜
แƒ”แƒšแƒ”แƒฅแƒขแƒ แƒแƒœแƒฃแƒšแƒ˜ แƒ›แƒ”แƒšแƒœแƒ˜แƒก แƒ›แƒแƒฌแƒงแƒแƒ‘แƒ˜แƒšแƒแƒ‘แƒ”แƒ‘แƒ–แƒ” แƒฌแƒแƒกแƒแƒ™แƒ˜แƒ—แƒฎแƒแƒ“, แƒ แƒแƒ’แƒแƒ แƒ˜แƒชแƒแƒ Kobo eReaders, แƒ—แƒฅแƒ•แƒ”แƒœ แƒฃแƒœแƒ“แƒ แƒฉแƒแƒ›แƒแƒขแƒ•แƒ˜แƒ แƒ—แƒแƒ— แƒคแƒแƒ˜แƒšแƒ˜ แƒ“แƒ แƒ’แƒแƒ“แƒแƒ˜แƒขแƒแƒœแƒแƒ— แƒ˜แƒ’แƒ˜ แƒ—แƒฅแƒ•แƒ”แƒœแƒก แƒ›แƒแƒฌแƒงแƒแƒ‘แƒ˜แƒšแƒแƒ‘แƒแƒจแƒ˜. แƒ“แƒแƒฎแƒ›แƒแƒ แƒ”แƒ‘แƒ˜แƒก แƒชแƒ”แƒœแƒขแƒ แƒ˜แƒก แƒ“แƒ”แƒขแƒแƒšแƒฃแƒ แƒ˜ แƒ˜แƒœแƒกแƒขแƒ แƒฃแƒฅแƒชแƒ˜แƒ”แƒ‘แƒ˜แƒก แƒ›แƒ˜แƒฎแƒ”แƒ“แƒ•แƒ˜แƒ— แƒ’แƒแƒ“แƒแƒ˜แƒขแƒแƒœแƒ”แƒ— แƒคแƒแƒ˜แƒšแƒ”แƒ‘แƒ˜ แƒ›แƒฎแƒแƒ แƒ“แƒแƒญแƒ”แƒ แƒ˜แƒš แƒ”แƒšแƒฌแƒแƒ›แƒ™แƒ˜แƒ—แƒฎแƒ•แƒ”แƒšแƒ”แƒ‘แƒ–แƒ”.