Inertial MEMS: Principles and Practice

Β· Cambridge University Press
Π•-ΠΊΠ½ΠΈΠ³Π°
497
Π‘Ρ‚Ρ€Π°Π½ΠΈΡ†ΠΈ
ΠžΡ†Π΅Π½ΠΈΡ‚Π΅ ΠΈ Ρ€Π΅Ρ†Π΅Π½Π·ΠΈΠΈΡ‚Π΅ Π½Π΅ сС ΠΏΠΎΡ‚Π²Ρ€Π΄Π΅Π½ΠΈ Β Π”ΠΎΠ·Π½Π°Ρ˜Ρ‚Π΅ повСќС

Π—Π° Π΅-ΠΊΠ½ΠΈΠ³Π°Π²Π°

A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.

Π—Π° Π°Π²Ρ‚ΠΎΡ€ΠΎΡ‚

Volker Kempe has more than 40 years of experience in research and development. He led the microelectronics engineering department at Austria Mikro Systems for over ten years. In 2003 he co-founded and became Vice President of SensorDynamics AG, and his current interests focus on the functionality, technology, and application of inertial MEMS.

ΠžΡ†Π΅Π½Π΅Ρ‚Π΅ ја Π΅-ΠΊΠ½ΠΈΠ³Π°Π²Π°

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