Microsystems or microelectromechanical systems (MEMS) are miniaturized devices with components measured in micrometers that perform micro- to nanometer scale electronic machine functions such as actuations. Since research and industrial production in recent decades has generated considerable knowledge of microsystem dynamics, there is an urgent need for a single guide which combines microsystem theory with practical applications to provide a general framework.
Microsystem Dynamics fills this need, with the first single-volume overview of its kind. It presents the fundamental principles of microsystem dynamics in a unified theoretical framework, engineered to govern both analysis and design. Its discussion of applications includes cutting-edge methods for applying non-stationary, stochastic, non-linear dynamics and multi-physics of microsystems. Fully engaged with the latest research, this promises to be the essential single-volume introduction to its subject.
Microsystem Dynamics readers will find:
Microsystem Dynamics is a useful reference for researchers and practitioners working in microscale engineering, as well as graduate students in mechanical, automotive, and electrical engineering.
Gang S. Chen is a professor at Marshall University. His industry experience includes working at Gates Corp., IBM, Sony, and DSI. He is also a Fellow of ASME and SAE.
Jianfeng Xu is a professor and associate dean of the School of Mechanical Engineering at Huazhong University of Science and Technology. His industry experience includes working at Applied Materials and DSI.
Wei Hua is a principal consultant at ABSWorld. His previous experience includes working at DSI.