Defects in Microelectronic Materials and Devices
Daniel M. Fleetwood · Ronald D. Schrimpf
Nov 2008 · CRC Press
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Uncover the Defects that Compromise Performance and ReliabilityAs microelectronics features and devices become smaller and more complex, it is critical that engineers and technologists completely understand how components can be damaged during the increasingly complicated fabrication processes required to produce them.A comprehensive survey of defe
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Daniel M. Fleetwood, Sokrates T. Pantelides, Ronald D. Schrimpf
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