Beam Processing Technologies
Norman G. Einspruch · S. S. Cohen · Raj N. Singh
dec. 2014 · VLSI Electronics Microstructure Science Bok 21 · Academic Press
E-bok
558
Sidor
family_home
Kvalificerad
info
reportBetyg och recensioner verifieras inte Läs mer
Om den här e-boken
Beam Processing Technologies is a collection of papers that deals with the miniaturization of devices that will be faster, consume less power, and cost less per operation or fabrication. One paper discusses metal oxide semiconductor (MOS) integrated circuit technology including the operation of devices whose lateral and vertical dimensions are scaled down. If the devices' silicon doping profiles are increased by the same scale factor, they can operate on lower voltages and currents, with the same performance. Another paper describes laser beam processing and wafer-scale integration as techniques to increase the number of devices on a silicon chip. Electron beam technologies can be used in many fabrication processes such as in microlithography, selective oxidation, doping, metrology. Ion beam applications depend on the presence of the ion introduced into the device (e.g. implantation doping), on pseudoelastic collisions (e.g. physical sputtering or crystal damage), and on inelastic scattering (e.g. polymer resist exposure). Silicon molecular beam epitaxy (SiMBE) can also grow high-quality layers at low temperature, particularly concerning germanium, especially as reagrds the growth system design and utilization of n- and p-type doping. Chemical beam epitaxy (CBE) is another epitaxial growth technique that can surpass MBE and metal organic chemical vapor deposition (MO-CVD). The collection is suitable chemical engineers, industrial physicists, and researchers whose work involve micro-fabrication and development of integrated circuits.
Betygsätt e-boken
Berätta vad du tycker.
Läsinformation
Smartphones och surfplattor
Installera appen Google Play Böcker för Android och iPad/iPhone. Appen synkroniseras automatiskt med ditt konto så att du kan läsa online eller offline var du än befinner dig.
Laptops och stationära datorer
Du kan lyssna på ljudböcker som du har köpt på Google Play via webbläsaren på datorn.
Läsplattor och andra enheter
Om du vill läsa boken på enheter med e-bläck, till exempel Kobo-läsplattor, måste du ladda ned en fil och överföra den till enheten. Följ anvisningarna i hjälpcentret om du vill överföra filerna till en kompatibel läsplatta.
